Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity to environmental variables such as temperature and pressure. As a result, technical approaches to address these factors such as vacuum sealing and ovenization of the resonators in a temperature controlled system have been introduced. However, residual sensitivity to such effects can still serve as a significant source of frequency fluctuations and drift in precision devices. This is experimentally demonstrated in this paper for a precision oven-controlled and vacuum-sealed silicon resonators. The frequency fluctuations of oscillators constructed using two separate nearly-identical co-located resonators on the same chip are analysed and differential frequency fluctuations are examined as a means of reducing the impact of common-mode effects such as temperature and pressure. For this configuration, our results show that the mismatch of temperature and pressure coefficients between the resonators ultimately limits the frequency stability. [2020-0395]

中文翻译：

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硅 MEMS 谐振器中温度和压力引起的频率波动的实验观察

硅 MEMS 谐振器越来越多地被用于定时和频率控制以及精密传感应用。众所周知，性能的一个关键限制与对环境变量（如温度和压力）的敏感性有关。因此，已经引入了解决这些因素的技术方法，例如温控系统中谐振器的真空密封和烘箱。然而，对这种效应的残余敏感性仍然可以作为精密设备中频率波动和漂移的重要来源。这在本文中针对精密恒温和真空密封的硅谐振器进行了实验证明。分析了在同一芯片上使用两个几乎相同的独立谐振器构建的振荡器的频率波动，并检查了差分频率波动作为减少共模效应（如温度和压力）影响的一种手段。对于这种配置，我们的结果表明谐振器之间的温度和压力系数的不匹配最终会限制频率稳定性。[2020-0395]