The research reports the design and experimental results of novel gyroscopes based on nano-resistive sensing, capable to meet navigation grade specifications within a sensor footprint of 1.3 mm ² and a total silicon structural volume of 0.026 mm ³ only. A significant increase of the scale-factor is obtained through a combination of (i) optimization of the Coriolis force transduction into a stress on the resistive gauges, (ii) increase of the drive motion amplitude and (iii) increase of the current through the sensing gauges. Combined with low-pressure eutectic packaging, this enables approaching the thermomechanical noise limits of the sensor at about 0.004 $^{\circ }/\surd $ hr. At the same time, electronics is developed with minimum demodulation phase errors, thus enabling optimized closed-loop quadrature compensation and minimization of drift effects. Thanks to the inherent rejection of parasitic couplings and associated drifts of the used technology, the overall stability reaches 0.02 °/hr on average on 6 samples. These performances are demonstrated for a 30-Hz system bandwidth and few hundred dps input range over several samples. Navigation grade performance are confirmed by additional in-operation experiments like gyrocompassing and in-run 9-minute long angle measurements from rate integration. [2021-0073]

中文翻译：

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1.3 mm ²导航级 NEMS 陀螺仪

该研究报告了基于纳米电阻传感的新型陀螺仪的设计和实验结果，该陀螺仪能够在 1.3 mm ²的传感器占位面积和 0.026 mm ³的总硅结构体积 内满足导航级规格 。通过以下组合获得比例因子的显着增加：（i）将科里奥利力转换为电阻计上的应力的优化，（ii）驱动运动幅度的增加和（iii）通过电流的增加传感仪表。结合低压共晶封装，这使得传感器的热机械噪声极限接近 0.004 $^{\circ }/\surd $ 小时。同时，开发的电子产品具有最小的解调相位误差，从而实现优化的闭环正交补偿和漂移效应的最小化。由于所用技术对寄生耦合和相关漂移的固有抑制，6 个样品的整体稳定性平均达到 0.02°/小时。这些性能在 30Hz 系统带宽和几个样本的几百 dps 输入范围内得到证明。导航等级性能通过额外的运行中实验得到证实，如陀螺罗盘和来自速率积分的运行中 9 分钟长角度测量。[2021-0073]