We present the fabrication and evaluation of a microchannel with thin Si windows and a trapping structure for injected liquid samples, including an evaluation using tubing methods of polydimethylsiloxane eyelets, and Kovar. Yeast cells and latex particles were observed using a fluorescence microscope under atmospheric conditions and a scanning electron microscope (SEM) under vacuum. As moving and flowing liquid samples cannot be observed for a long time, a trapping structure in the microchannel is required. In our experiment using pole structures under a thin Si window in microchannels to trap liquid samples, we successfully observed them using the SEM under an accelerating voltage of 15 kV and an emission current of $75~\mu \text{A}$ . This result indicates the possibility of using higher accelerating voltages of electrons for higher observation resolutions at a lower power density of 2.3 kW/cm ² . Microfluidic channels with a thin window would be a useful technique for monitoring liquid samples under vacuum. [2020-0367]

中文翻译：

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评估具有薄 Si 窗口和捕获结构的微流体通道

我们介绍了具有薄 Si 窗口和用于注射液体样品的捕获结构的微通道的制造和评估，包括使用聚二甲基硅氧烷孔眼和 Kovar 的管道方法进行的评估。使用大气条件下的荧光显微镜和真空下的扫描电子显微镜（SEM）观察酵母细胞和乳胶颗粒。由于长时间无法观察到移动和流动的液体样品，因此需要在微通道中设置捕获结构。在我们的实验中，我们使用微通道中薄 Si 窗口下的极结构来捕获液体样品，我们在 15 kV 的加速电压和发射电流下使用 SEM 成功地观察到它们 $75~\mu \text{A}$ . 该结果表明在 2.3 kW/cm ²的较低功率密度下使用更高的电子加速电压以获得更高的观察分辨率的可能性 。具有薄窗口的微流体通道将是一种在真空下监测液体样品的有用技术。[2020-0367]