Abstract

A theoretical and numerical study is performed of the effect of the thickness and the coefficients of the elasticity, viscosity, and electrical conductivity of a film deposited on a free side of a piezoelectric resonator with a lateral electric field on its characteristics. It is shown that an increase in the mechanical impedance of the film and its conductivity lower the maximum value of the real part of the resonator’s electrical impedance.

中文翻译：

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沉积在具有横向电场的谐振器上的有限厚度导电膜对其特性的影响

摘要

对沉积在具有横向电场的压电谐振器自由侧的薄膜的厚度和弹性系数、粘度和电导率的影响进行了理论和数值研究。结果表明，薄膜机械阻抗的增加及其电导率降低了谐振器电阻抗实部的最大值。