Abstract

The effect of the main thermal sputtering parameters on the cohesive strength of the coating with respect to the substrate surface is considered. At the stages of particle heating, acceleration, transfer, and contact, the relationships between the parameters of the sputtering process and the factors that determine the cohesive strength between the sputtered material and the substrate surface have been revealed. The relationships between the cohesive strength and the technological parameters and sputtering modes in the operations of applying and machining of functional resistant coatings are formalized.

中文翻译：

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热溅射参数对功能性电阻涂层内聚强度的影响

摘要

考虑了主要热溅射参数对涂层相对于基材表面的内聚强度的影响。在粒子加热、加速、转移、接触等阶段，揭示了溅射工艺参数与决定溅射材料与基板表面内聚强度的因素之间的关系。形式化了内聚强度与功能性抗性涂层应用和加工操作中的工艺参数和溅射模式之间的关系。