A novel heterogeneous integrated inertial micro-switch has been designed with adjustable acceleration threshold and a stable ‘on’-state due to a predefined bias voltage. The bias voltage is applied onto the large-area parallel-plate electrodes, which endows the movable proof-mass with electrostatic forces. With an external excitation acceleration, the movable electrode moves to the fixed electrode and it can be locked by the electrostatic force onto the compliant electrical contacts, which are composed of micro-cantilever array to eliminate the contact rebound during electrostatic pull-in process. Both the dynamic response of the proof-mass and the relationship between the bias voltage and the inertial excitation acceleration were analyzed using theoretical model and finite element simulation. A unique heterogeneous integration process including both the silicon-based and non-silicon surface micromachining processes was adopted to fabricate the switch. The tests using a standard dropping hammer system demonstrated that the switch could keep a stable switch-on at the 57 g excitation acceleration and 38 V bias voltage. As wide as 52% adjustment range of the acceleration threshold was obtained when the applied bias voltage was from 38 V to 44 V. The tested relationship between the bias voltage and the external acceleration was very consistent with the simulated relationship. [2019-0038]

中文翻译：

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具有兼容悬臂固定电极和静电锁定的异构集成 MEMS 惯性开关以实现稳定的导通状态

设计了一种新型异构集成惯性微动开关，具有可调节的加速度阈值和由于预定义的偏置电压而具有稳定的“导通”状态。偏置电压施加到大面积平行板电极上，这赋予可移动质量块以静电力。在外部激励加速度的作用下，可动电极移动到固定电极，通过静电力将其锁定到柔性电触点上，该触点由微悬臂阵列组成，以消除静电吸合过程中的触点反弹。使用理论模型和有限元仿真分析了质量块的动态响应以及偏置电压与惯性激励加速度之间的关系。采用独特的异构集成工艺，包括硅基和非硅表面微加工工艺来制造开关。使用标准落锤系统的测试表明，该开关可以在 57 g 激励加速度和 38 V 偏置电压下保持稳定接通。当施加的偏置电压从 38 V 到 44 V 时，加速度阈值的调节范围达到了 52%。测试的偏置电压和外部加速度之间的关系与模拟关系非常一致。[2019-0038] 使用标准落锤系统的测试表明，该开关可以在 57 g 激励加速度和 38 V 偏置电压下保持稳定接通。当施加的偏置电压从 38 V 到 44 V 时，加速度阈值的调节范围达到了 52%。测试的偏置电压与外部加速度之间的关系与模拟关系非常一致。[2019-0038] 使用标准落锤系统的测试表明，该开关可以在 57 g 激励加速度和 38 V 偏置电压下保持稳定接通。当施加的偏置电压从 38 V 到 44 V 时，加速度阈值的调节范围达到了 52%。测试的偏置电压和外部加速度之间的关系与模拟关系非常一致。[2019-0038]