Regarding the dependence of the treatment of removing polymethyl methacrylate (PMMA) from graphene upon the prestress in the film, two typical PMMA removal methods including acetone-vaporing and high-temperature annealing were investigated based on the opto-mechanical behaviors of the developed optical fiber Fabry-Perot (F-P) resonant sensor with a 125-µm diameter and ∼10-layer-thickness graphene diaphragm. The measured resonant responses showed that the F-P sensor via annealing process exhibited the resonant frequency of 481 kHz and quality factor of 1 034 at ∼2 Pa and room temperature, which are respectively 2.5 times and 33 times larger than the acetone-treated sensor. Moreover, the former achieved a high sensitivity of 110.4 kHz/kPa in the tested range of 2 Pa–2.5 kPa, apparently superior to the sensitivity of 16.2 kHz/kPa obtained in the latter. However, the time drift of resonant frequency also mostly tended to occur in the annealed sensor, thereby shedding light on the opto-mechanical characteristics of graphene-based F-P resonant sensors, along with an optimized optical excitation and detection scheme.

关于从石墨烯中去除聚甲基丙烯酸甲酯 (PMMA) 的处理对薄膜中预应力的依赖性，基于开发的光纤的光机械行为，研究了两种典型的 PMMA 去除方法，包括丙酮蒸发和高温退火法布里-珀罗 (FP) 谐振传感器，直径为 125 微米，石墨烯膜片厚度约为 10 层。测量的谐振响应表明，通过退火工艺的 FP 传感器在 ~2 Pa 和室温下表现出 481 kHz 的谐振频率和 1 034 的品质因数，分别比丙酮处理的传感器大 2.5 倍和 33 倍。此外，前者在2 Pa-2.5 kPa的测试范围内实现了110.4 kHz/kPa的高灵敏度，明显优于16的灵敏度。后者获得 2 kHz/kPa。然而，谐振频率的时间漂移​​也主要发生在退火传感器中，从而揭示了基于石墨烯的 FP 谐振传感器的光机械特性，以及优化的光激发和检测方案。