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DLC (H) coated 13Cr SMSS by high-pulsed power CVD technique
Surface Engineering ( IF 2.8 ) Pub Date : 2020-12-02 , DOI: 10.1080/02670844.2020.1840737
Yukun Zhang 1 , Dongxu Chen 1 , Hongyun Deng 1 , Jilong Qi 1 , Kaice Zhang 1 , Zhe Lv 1 , Tao Zhang 2 , Peng Gao 3 , Yanwen Zhou 1
Affiliation  

ABSTRACT

Hydrogenated diamond-like carbon (DLC: H) films were successfully fabricated on the surface of 13Cr super martensitic stainless steel by high-pulsed power chemical vapour deposition. The mechanical and tribological properties of the films related to the substrate bias voltages were investigated. The results showed that the surface hardness and tribological properties of the substrate after DLC film deposition were improved. The DLC films became dense, the grain size and roughness reduced, and the deposition rates increased as the bias voltage increased. In addition, the dense DLC films directly led to high nanohardness and elastic modulus. The H content decreased with an increase in the bias voltage, which may be the primary reason for nanohardness and modulus enhancement. Due to the relatively high H/E* and H2/E*3 ratios of films corresponded to high elastic strain and plastic deformation resistances reduced the wear loss, and the localized graphitization on the surface provided solid lubrication.



中文翻译:

DLC (H) 涂层 13Cr SMSS 通过高脉冲功率 CVD 技术

摘要

通过高脉冲功率化学气相沉积在13Cr超级马氏体不锈钢表面成功制备了氢化类金刚石碳(DLC:H)薄膜。研究了与衬底偏置电压相关的薄膜的机械和摩擦学特性。结果表明,DLC薄膜沉积后基体的表面硬度和摩擦学性能得到改善。随着偏置电压的增加,DLC 薄膜变得致密,晶粒尺寸和粗糙度减小,沉积速率增加。此外,致密的 DLC 薄膜直接导致高纳米硬度和弹性模量。H含量随着偏置电压的增加而降低,这可能是纳米硬度和模量增强的主要原因。由于相对较高的H /E * 和H 2 / E * 3比值对应于高弹性应变和抗塑性变形的薄膜减少了磨损损失,并且表面的局部石墨化提供了固体润滑。

更新日期:2020-12-02
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