Secondary ion mass spectrometry using the argon cluster primary ion beam enables molecular compositional depth profiling of organic thin films with minimal loss of chemical information or changes in sputter rate. However, for depth profiles of thicker organic films (>10 μm of sputtered depth), we have observed the rapid formation of micron-scale topography in the shape of pillars that significantly affect both the linearity of the sputter yield and depth resolution. To minimize distortions in the 3D reconstruction of the sample due to this topography, a stepwise, staggered sample rotation was employed. By using polymer spheres embedded in an organic film, it was possible to measure the depth resolution at the film-sphere interface as a function of sputtered depth and observe when possible distortions in the 3D image occurred. In this way, it was possible to quantitatively measure the effect of micron-scale topography and sample rotation on the quality of the depth profile.

中文翻译：

---

使用气体簇二次离子质谱法进行深度剖析：微米形貌发展和对深度分辨率的影响

使用氩簇初级离子束的次级离子质谱法能够对有机薄膜进行分子成分深度分析，同时最大限度地减少化学信息的损失或溅射速率的变化。然而，对于较厚有机薄膜的深度剖面（溅射深度 > 10 μm），我们观察到柱状微米级形貌的快速形成，这显着影响溅射产量的线性度和深度分辨率。为了最大限度地减少由于该地形导致的样本 3D 重建中的失真，采用了逐步、交错的样本旋转。通过使用嵌入有机薄膜中的聚合物球体，可以测量薄膜-球体界面处的深度分辨率作为溅射深度的函数，并观察 3D 图像何时发生可能的失真。这样，