Nonlinear oxides such as LiNbO₃ have found many applications in both conventional electro-optics and quantum optics. In this work, we demonstrate the van der Waals and remote epitaxy of LiNbO₃ films on muscovite mica and graphene-buffered sapphire, respectively, by pulsed laser deposition. Structural analysis shows that the epitaxial relation in van der Waals epitaxy is LiNbO₃ (0001) || mica (001) and LiNbO₃ [$01\overline{1}0$] || mica [010] with LiNbO₃ [$10\overline{1}0$] || mica [010], a 60°-rotated twin structure. The relation in remote epitaxy is LiNbO₃ (0001) || sapphire (0001) and LiNbO₃ [$01\overline{1}0$] || sapphire [$01\overline{1}0$] with twin structure LiNbO₃ [$\overline{1}010$] || sapphire [$01\overline{1}0$]. Furthermore, in remote epitaxy, Raman scattering analysis confirms the existence of graphene after deposition. Finally, we find that the oxygen partial pressure influences the presence of impurity phases significantly. The successful demonstration of van der Waals and remote epitaxy promises the feasibility of developing thin film LiNbO₃ on demanded substrates toward scalable electro-optics.

中文翻译：

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利用脉冲激光沉积法对 LiNbO3 薄膜进行范德华外延和远程外延

非线性氧化物如 LiNbO ₃已在传统电光和量子光学中发现了许多应用。在这项工作中，我们分别通过脉冲激光沉积在白云母和石墨烯缓冲的蓝宝石上展示了 LiNbO ₃薄膜的范德华力和远程外延。结构分析表明范德华外延中的外延关系为LiNbO ₃ (0001) || 云母 (001) 和 LiNbO ₃ [$01\overline{1}0$] || 云母 [010] 与 LiNbO ₃ [$10\overline{1}0$] || 云母[010]，60°旋转的孪晶结构。远程外延的关系为 LiNbO ₃ (0001) || 蓝宝石 (0001) 和 LiNbO ₃ [$01\overline{1}0$] || 蓝宝石 [$01\overline{1}0$] 具有孪晶结构 LiNbO ₃ [$\overline{1}010$] || 蓝宝石 [$01\overline{1}0$]。此外，在远程外延中，拉曼散射分析证实了沉积后石墨烯的存在。最后，我们发现氧分压显着影响杂质相的存在。范德华力和远程外延的成功演示保证了在所需基板上开发薄膜 LiNbO ₃以实现可扩展电光的可行性。