The features of coating deposition in high aspect slot nanostructures were studied using a novel hybrid model of heat and mass transfer, which is a combination of molecular dynamics (MD) and Monte Carlo (MC) methods. In contrast to other hybrid models, the MD method in our model is used in combination with the MC method at the gas phase boundary in the field of the walls limiting the volume of the system. In this case, the MC method is used only to statistically determine the scattering type of molecules on the surface and molecular velocities after the scattering. This MD/MC hybrid model was applied to describe the energy exchange with the surface of the reactor system: a slot nanostructure with a complex geometric shape and strong non-uniformity of temperature distribution and thermal physical properties of the surface. It was shown that such heterogeneity causes correlative changes in the energy exchange on other parts of the walls in a high aspect slot nanostructure.

使用分子动力学 (MD) 和蒙特卡罗 (MC) 方法相结合的新型传热和传质混合模型，研究了高纵横槽纳米结构中涂层沉积的特征。与其他混合模型相比，我们模型中的 MD 方法与 MC 方法在限制系统体积的壁场中的气相边界处结合使用。在这种情况下，MC 方法仅用于统计确定表面分子的散射类型和散射后的分子速度。该MD/MC混合模型用于描述与反应器系统表面的能量交换：具有复杂几何形状和表面温度分布和热物理性质的强烈非均匀性的狭缝纳米结构。