Multi-parameter detection is key in the domain of sensors. Here it is demonstrated that an indium tin oxide (ITO) nanocoating can be used to generate multiple lossy mode resonances (LMRs) in the optical spectrum. To achieve this, a nanocoating with a gradient in thickness is generated on the surface of a planar waveguide, permitting broadening of the LMR because the position of an LMR in the optical spectrum is directly related to the nanocoating thickness. The nanocoating with a gradient in thickness contributes multiple LMRs, each one centred at a different wavelength. With a further etching or deposition using a mask, a pattern of deposited and non-deposited regions can be created, resulting in isolation of the LMRs by preventing LMR overlap. This enables tracking of each central wavelength separately, which can be tuned through control of the gradient or nanocoating pattern. The array of LMR-based sensors is a photonics analogue to the interdigital concept in electronics, enabling multiple resonances to be used for multiparameter sensing.

多参数检测是传感器领域的关键。这里证明了氧化铟锡 (ITO) 纳米涂层可用于在光谱中产生多个有损模式共振 (LMR)。为了实现这一点，在平面波导的表面上产生具有厚度梯度的纳米涂层，允许 LMR 加宽，因为 LMR 在光谱中的位置与纳米涂层厚度直接相关。具有梯度厚度的纳米涂层会产生多个 LMR，每个 LMR 都以不同的波长为中心。通过使用掩模的进一步蚀刻或沉积，可以创建沉积和非沉积区域的图案，从而通过防止LMR重叠来隔离LMR。这可以分别跟踪每个中心波长，可以通过控制梯度或纳米涂层图案来调整。基于 LMR 的传感器阵列是一种类似于电子学中叉指概念的光子学，使多重共振可用于多参数传感。