The shape of the temperature nano-probes is a significant factor to evaluate the temperature measurement accuracy in the nanoscale temperature detection. Based on the finite element numerical simulation method, the temperature nano-probe model is established for nano-devices with variable powers. The temperature nano-probes with different shapes of sphere, rod, tube and disk are designed and studied. It is found that the heat transfer process between the nano-device and the temperature nano-probes is affected by the shape of nano-probes. Additionally it is dependent on the size of the device and the gap distance between the nano-device and nano-probes. The high stability and accuracy in the temperature measurement process is obtained in case of the nano-probe with the shape of nano-disk. The temperature error can be minimized through controlling the side length of the disk.

温度纳米探针的形状是评价纳米级温度检测中测温精度的重要因素。基于有限元数值模拟方法，建立了变功率纳米器件的温度纳米探针模型。设计并研究了不同形状的球、棒、管和盘的温度纳米探针。发现纳米器件与温度纳米探针之间的传热过程受纳米探针形状的影响。此外，它取决于器件的尺寸以及纳米器件和纳米探针之间的间隙距离。纳米圆盘形状的纳米探针在温度测量过程中获得了高稳定性和准确性。