Recently miniaturization, integration and high sensitivity are becoming the mainstream of the development of pressure sensing technology. This paper proposes a pressure sensor realized with the microring resonator on a cantilever beam. The performance of the pressure sensor is theoretical analyzed and then simulated using finite element modeling. It shows that the cantilever beam substrate can greatly improve the sensitivity compared with a simple supported beam. The fabricated microring resonator pressure sensor has 3 dB bandwidth of about 0.1488 nm and a Q-factor of 10511. The experimental results demonstrate that the resonant wavelength shift of the microring pressure sensor has an almost linear relationship with the displacement of pressure testing device.

近来小型化、集成化和高灵敏度正成为压力传感技术发展的主流。本文提出了一种用悬臂梁上的微环谐振器实现的压力传感器。压力传感器的性能进行了理论分析，然后使用有限元建模进行了仿真。表明悬臂梁基板与简单的支撑梁相比，可以大大提高灵敏度。制作的微环谐振器压力传感器具有约0.1488 nm的3 dB带宽和10511的Q因子。实验结果表明微环压力传感器的谐振波长偏移与压力测试装置的位移几乎呈线性关系。