The combined effect of the mass and stiffness on a double-layered microcantilever has been studied. The resonance frequency of a silicon microcantilever with thin nickel film deposited on top is monitored as a function of the film thickness and examined based on a bi-layer cantilever model. These reveal that both mass and stiffness of the top layer on the cantilever structure affect the rate of the frequency change and the approximated expression for the thickness, where the frequency change deviates from the linear response, is presented, which would help to understand its dynamics upon the continuous accumulation of top layer.

中文翻译：

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质量和刚度对双层微悬臂梁动力学的综合影响

已经研究了质量和刚度对双层微悬臂梁的综合影响。顶部沉积有薄镍膜的硅微悬臂梁的共振频率作为膜厚度的函数进行监测，并基于双层悬臂梁模型进行检查。这些表明悬臂结构上顶层的质量和刚度都会影响频率变化的速率，并给出了厚度的近似表达式，其中频率变化偏离线性响应，这将有助于理解其动力学随着顶层的不断积累。