Abstract—

Results of experiments on a linear facility with a helicon plasma source operating at a frequency of 13.56 MHz and a power of up to 15 kW are reported. In the experiments, different antennas (coil, NAGOYA TYPE III, and half-wave helicon) with azimuthal wavenumbers of m = 0, ±1 were used. Plasma density and electron temperature radial profiles for antennas of these types were measured as a function of the magnetic field under the antenna and the gas pressure. The maximum plasma density obtained in the experiments was 2 × 10¹³ cm^–3 at a magnetic field of ~200 G.

中文翻译：

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用于线性等离子体发生器的高密度螺旋等离子体源

摘要-

报告了在具有 13.56 MHz 频率和高达 15 kW 功率的螺旋等离子体源的线性设施上的实验结果。在实验中，使用了方位波数为m = 0, ±1 的不同天线（线圈、NAGOYA TYPE III 和半波螺旋天线）。这些类型天线的等离子体密度和电子温度径向分布被测量为天线下磁场和气压的函数。实验中获得的最大等离子体密度在~200 G 的磁场下为 2 × 10 ¹³ cm ^–3。