Abstract

A sensor sensitive to acetone vapors based on a Fe₂O₃❬Sn❭ metal oxide solid solution was fabricated by high-frequency magnetron sputtering. The gas-sensitivity of the manufactured sensor are investigated. The Fe₂O₃❬Sn❭ sensor shows sensitivity to acetone vapors starting from a temperature of 150°C under the influence of ultraviolet rays. The increase in operating temperature was accompanied by a linear increase in the sensor response. Exposure to ultraviolet rays not only improved the sensitivity of the sensor under study, but also increased its performance. A sensor based on Fe₂O₃❬Sn❭ can be successfully applied in acetone detectors.

中文翻译：

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紫外线对丙酮蒸气检测传感器灵敏度的影响

摘要

通过高频磁控溅射制备了一种基于 Fe ₂ O ₃ ❬Sn❭ 金属氧化物固溶体的对丙酮蒸汽敏感的传感器。研究了制造的传感器的气体敏感性。Fe ₂ O ₃ ❬Sn❭ 传感器在紫外线的影响下，从 150°C 的温度开始显示出对丙酮蒸汽的敏感性。工作温度的增加伴随着传感器响应的线性增加。暴露在紫外线下不仅提高了所研究传感器的灵敏度，而且还提高了其性能。基于 Fe ₂ O ₃ ❬Sn❭ 的传感器可成功应用于丙酮检测器。