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Highly Sensitive Piezoresistive Sensors Based on a Voltage Divider Circuit With TFTs for Ultra-Low Pressure Detection
IEEE Journal of the Electron Devices Society ( IF 2.3 ) Pub Date : 2021-05-31 , DOI: 10.1109/jeds.2021.3085135
Jiayu Feng , Longlong Chen , Xifeng Li , Jianhua Zhang

A highly sensitive piezoresistive tactile sensor combined with the thin-film transistors (TFTs) is produced in this letter. The sensor uses two-dimensional Ti 3 C 2 -MXenes as piezoresistive material which is one type of transition metal carbide, nitride and/or carbonitride with a lamellar structure. A voltage divider circuit is designed by connecting piezoresistive material with TFT technology. TFT works in the subthreshold and saturation region during the sensing process to ensure that the magnitude change of current is measured in a small voltage range. The tactile sensor shows high sensitivity of 4636.1 kPa $^{-1}$ , ultra-low tactile detection of 0.98 Pa, and extremely durability for 1,500 sensing cycles. Resultantly, the sensor demonstrates excellent potential for electronic touchscreens and advanced medical testing.

中文翻译:

基于分压电路的高灵敏度压阻式传感器和 TFT 用于超低压检测

在这封信中生产了一种与薄膜晶体管 (TFT) 相结合的高灵敏度压阻式触觉传感器。该传感器使用二维Ti 3 C 2 -MXenes 作为压阻材料,它是一种具有层状结构的过渡金属碳化物、氮化物和/或碳氮化物。采用TFT技术连接压阻材料设计了分压电路。TFT在传感过程中工作在亚阈值和饱和区,以确保在很小的电压范围内测量电流的幅度变化。触觉传感器显示出 4636.1 kPa 的高灵敏度 $^{-1}$ , 0.98 Pa 的超低触觉检测,以及 1,500 次传感周期的超强耐用性。因此,该传感器在电子触摸屏和先进的医学测试方面展现了出色的潜力。
更新日期:2021-06-15
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