A novel holographic femtosecond laser parallel processing method based on the fractional Fourier transform is proposed, which increases the flexibility of the processing position of the parallel beam as well as the available space in the paraxial area. Computer-generated holograms are produced by combining the fractional Fourier transform and an iterative algorithm with excellent uniformity and diffraction efficiency. Parallel processing can be implemented for complex microstructures by adjusting the femtosecond laser beam using a spatial light modulator. The zero-order beam spot can be actively defocused by changing the fractional order method or exploited to fabricate various structures to improve laser energy utilization.

提出了一种新的基于分数傅里叶变换的全息飞秒激光并行加工方法，增加了平行光束加工位置的灵活性以及近轴区域的可用空间。计算机生成的全息图是通过将分数傅立叶变换和具有出色均匀性和衍射效率的迭代算法相结合而产生的。通过使用空间光调制器调整飞秒激光束，可以对复杂的微结构进行并行处理。零级光斑可以通过改变分数阶方法来主动散焦，或用于制造各种结构以提高激光能量利用率。