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Copper removal from semiconductor CMP wastewater in the presence of nano-SiO2 through biosorption
Journal of Water Reuse and Desalination ( IF 2.3 ) Pub Date : 2021-06-01 , DOI: 10.2166/wrd.2021.098
Xiaoyu Wang 1 , Gude Buer 1 , Wei Fan 1 , Lei Gao 1 , Mingxin Huo 1
Affiliation  

Copper-bearing wastewater from chemical mechanical planarization (CMP) is a typical semiconductor development byproduct. How to effectively treat Cu2+ in the CMP wastewater is a great concern in the microchip manufacturing industry. In this study, we investigated the potential for the microbial removal of Cu2+ by a multiple heavy metal-resistant bacterium Cupriavidus gilardii CR3. The environmental factors, including pH, nano-SiO2, ionic strengths, and initial concentrations of Cu2+, and adsorption times on the bioremoval of Cu2+ in CMP wastewater were optimized. Under optimal condition, the maximum biosorption capacity for Cu2+ was 18.25 mg g−1 and the bioremoval rate was 95.2%. The Freundlich model is described well for the biosorption of Cu2+ in CMP wastewater in the presence of nano-SiO2 (R2 = 0.99). The biosorption process obeyed the pseudo-second-order kinetic equation (R2 > 0.99). In the column experiment, the advection–dispersion–retention model fitted the breakthrough curve of all experiments well (R2 > 0.95). The attachment coefficient in the sand matrix coated by CR3 biofilm was 2.24–2.80 times as that in clean sand. Overall, C. gilardii CR3 is a promising candidate to remove Cu2+ from CMP wastewater. Nano-SiO2 in CMP wastewater did not inhibit the bioremoval of Cu2+ but showed a slight promotion effect instead.



中文翻译:

纳米SiO2存在下半导体CMP废水中铜的生物吸附去除

来自化学机械平坦化 (CMP) 的含铜废水是典型的半导体开发副产品。如何有效处理CMP废水中的Cu 2+是微芯片制造行业非常关心的问题。在这项研究中,我们研究了多重重金属抗性细菌Cupriavidus gilardii CR3微生物去除 Cu 2+的潜力。优化了环境因素,包括pH、纳米SiO 2、离子强度和Cu 2+ 的初始浓度,以及对CMP 废水中Cu 2+生物去除的吸附时间。在最佳条件下,对Cu 2+的最大吸附量为18.25 mg g-1,生物去除率为95.2%。Freundlich 模型很好地描述了在纳米 SiO 2 ( R 2 = 0.99)存在下 CMP 废水中Cu 2+的生物吸附。吸附过程服从准二级动力学方程(R 2 > 0.99)。在柱实验中,对流-弥散-滞留模型很好地拟合了所有实验的突破曲线(R 2 > 0.95)。CR3 生物膜覆盖的砂基体中的附着系数是清洁砂的 2.24-2.80 倍。总体而言,C. gilardii CR3 是从 CMP 废水中去除 Cu 2+的有希望的候选者。纳米SiO 2CMP废水中的Cu 2+没有抑制Cu 2+的生物去除,反而表现出轻微的促进作用。

更新日期:2021-06-14
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