We used low-cost ultrasonic spray pyrolysis to prepare fluorine-doped tin oxide film from 470 to 590°C in 30°C increments with air and nitrogen as carrier gas. The film had 86.4% optical transparency and 16.8 Ω/□ electrical resistivity. The quality factor was defined as average optical transmittance to the 10th power divided by square resistance. The quality factor for one film fabricated at 590°C was 139 × 10−4/Ω, which is acceptable for many commercial applications. Detailed analysis indicates that the optical and electrical properties are greatly influenced by the film microstructure which is a function of temperature.

中文翻译：

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超声喷雾热解法沉积掺氟氧化锡薄膜的生长及性能

我们使用低成本的超声波喷雾热解以空气和氮气作为载气，在 470 至 590°C 以 30°C 的增量制备掺氟氧化锡薄膜。该膜具有86.4%的光学透明度和16.8Ω/□的电阻率。品质因数定义为平均光透射率的 10 次方除以平方电阻。在 590°C 下制造的一种薄膜的品质因数为 139 × 10−4/Ω，这对于许多商业应用来说是可以接受的。详细分析表明，作为温度函数的薄膜微观结构极大地影响了光学和电学性能。