This paper aims to focus on the fabrication and characterization of mixed thin-/thick-film thermoelectric microgenerators, based on magnetron sputtered constantan (copper–nickel alloy) and screen-printed silver. To improve the adhesion of the constantan layer to the applied substrates, the additional chromium sublayer was used. The aim of the study was to investigate the influence of chromium sublayer on the electrical and thermoelectric properties of such hybrid microgenerators.,Fabrication of such structures consisted of several steps – magnetron sputtering of the chromium and then constantan layer, exposing the first arms of thermocouples, applying the second arms by screen-printing technology and firing the prepared structures in a belt furnace. The structures were made both on Al2O3 (alumina) and low temperature co-fired ceramics (LTCC) substrates.,To the best of the authors’ knowledge, for the first time, laser ablation process was applied to fabricate the first arms of thermocouples from a layer of constantan only or constantan with a chromium sublayer. Geometric measurements have shown that the mapping of mask pattern by laser ablation technique is very accurate.,The determined Seebeck coefficient of the realized structures was about 40.4 µV/K. After firing the exemplary structures at 850°C peak temperature, Seebeck coefficient is increased to an average value of 51 µV/K.

中文翻译：

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基于康铜/铬和银臂的混合薄/厚膜热电微型发电机的制备与表征

本文旨在关注基于磁控溅射康铜（铜镍合金）和丝网印刷银的混合薄/厚膜热电微型发电机的制造和表征。为了提高康铜层对所施加基材的附着力，使用了额外的铬亚层。该研究的目的是研究铬亚层对这种混合微型发电机的电和热电性能的影响。这种结构的制造包括几个步骤 - 铬的磁控溅射，然后是康铜层，暴露热电偶的第一臂，通过丝网印刷技术应用第二臂并在带式炉中烧制制备的结构。这些结构是在 Al2O3（氧化铝）和低温共烧陶瓷 (LTCC) 衬底上制成的。据作者所知，这是第一次应用激光烧蚀工艺制造热电偶的第一臂仅一层康铜或带有铬亚层的康铜。几何测量表明，通过激光烧蚀技术对掩模图案的映射非常准确。所实现结构的确定塞贝克系数约为 40.4 µV/K。在 850°C 峰值温度下烧制示例性结构后，塞贝克系数增加到 51 µV/K 的平均值。几何测量表明，通过激光烧蚀技术对掩模图案的映射非常准确。所实现结构的确定塞贝克系数约为 40.4 µV/K。在 850°C 峰值温度下烧制示例性结构后，塞贝克系数增加到 51 µV/K 的平均值。几何测量表明，通过激光烧蚀技术对掩模图案的映射非常准确。所实现结构的确定塞贝克系数约为 40.4 µV/K。在 850°C 峰值温度下烧制示例性结构后，塞贝克系数增加到 51 µV/K 的平均值。