In this work, a TiO₂-Ag composite structure was fabricated by combination of physical vapor deposition and oblique angle deposition. The nanostructure of the TiO₂ columnar thin film was analyzed using the field emission scanning electron microscopy. The excitation of the surface plasmon-polariton waves was studied using an optical setup that is called the two-layer Kretschman geometry. The results showed that two surface plasmon-polariton modes are propagated for TiO₂ dielectric thin film at oblique deposition that they are related to metal-air and TiO₂-metal interfaces. The surface plasmon-polariton modes were more localized on interfaces at glancing angles of incident flux vapor. In normal incident of flux vapor only, one surface plasmon-polariton mode can be excited at interface of metal-air. Also, the simulation results by transfer matrix method showed good agreement with the experimental results. The results of this research may be applied in simultaneous sensing of the different molecules, chemical species, and nanoparticles with different sizes.

在这项工作中，通过物理气相沉积和斜角沉积相结合制备了TiO ₂ -Ag 复合结构。使用场发射扫描电子显微镜分析TiO ₂柱状薄膜的纳米结构。使用称为两层 Kretschman 几何结构的光学装置研究了表面等离子体极化波的激发。结果表明，倾斜沉积时TiO ₂介电薄膜传播两种表面等离子体-极化模式，这与金属-空气和TiO _{2 相关。}-金属接口。表面等离子体激元模式更多地集中在入射通量蒸汽掠射角的界面上。仅在通量蒸汽的法向入射中，可以在金属-空气界面激发一种表面等离子体-极化模式。此外，传递矩阵法的模拟结果与实验结果吻合良好。这项研究的结果可用于同时感测不同分子、化学物质和不同尺寸的纳米粒子。