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Comparison among translational temperatures of , , and in inductively coupled plasmas
Japanese Journal of Applied Physics ( IF 1.5 ) Pub Date : 2021-06-07 , DOI: 10.35848/1347-4065/ac04f1
Kosuke Takada 1 , Shusuke Nishiyama 2 , Koichi Sasaki 1
Affiliation  

We compared the translational temperatures of $\mathrm{He}{(}^{1}{P}_{1}^{{\rm{o}}})$, $\mathrm{He}{(}^{3}{S}_{1})$, and $\mathrm{Ar}(4s[3/2{]}_{2}^{{\rm{o}}})$ in low-pressure inductively coupled plasmas. We employed laser absorption spectroscopy for measuring the Doppler broadening widths of the transition lines, and they told us the translational temperatures of the three electronic excited states. From the comparison between the temperatures of $\mathrm{He}{(}^{1}{P}_{1}^{{\rm{o}}})$ and $\mathrm{He}{(}^{3}{S}_{1})$, we confirmed that the metastable 3 S 1 state can work as the probe for the temperature measurement of the ground state helium atoms. We observed higher temperatures for $\mathrm{Ar}(4s[3/2{]}_{2}^{{\rm{o}}})$ than $\mathrm{He}{(}^{3}{S}_{1})$ in helium–argon mixture plasmas with total pressures less than 80 mTorr. The higher $\mathrm{Ar}(4s[3/2{]}_{2}^{{\rm{o}}})$ temperature is considered to be due to the selective heating of argon by the charge exchange collision with Ar+.



中文翻译:

、 和 电感耦合等离子体的平移温度比较

我们比较的平移温度$\mathrm{He}{(}^{1}{P}_{1}^{{\rm{o}}})$$\mathrm{He}{(}^{3}{S}_{1})$$\mathrm{Ar}(4s[3/2{]}_{2}^{{\rm{o}}})$在低压感应耦合等离子体。我们使用激光吸收光谱来测量过渡线的多普勒展宽宽度,他们告诉我们三个电子激发态的平移温度。从的温度之间的比较$\mathrm{He}{(}^{1}{P}_{1}^{{\rm{o}}})$$\mathrm{He}{(}^{3}{S}_{1})$,我们证实,亚稳3 小号 1状态可作为探针用于接地状态氦原子的温度测量工作。我们观察到$\mathrm{Ar}(4s[3/2{]}_{2}^{{\rm{o}}})$$\mathrm{He}{(}^{3}{S}_{1})$总压力小于 80 mTorr 的氦-氩混合等离子体更高的温度。越高$\mathrm{Ar}(4s[3/2{]}_{2}^{{\rm{o}}})$温度被认为是由于与 Ar +的电荷交换碰撞选择性加热了氩气。

更新日期:2021-06-07
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