Abstract

The possibility of manufacturing a superhard plasma coating based on titanium, nitrogen, and carbon on a metal substrate in a nitrogen atmosphere is shown. The coatings were deposited in one short-term accelerator operation cycle under the action of a hyperspeed jet of electroerosive Ti-containing plasma on the substrate surface. It is shown by SEM and XRD that nanostructured layers of titanium nitride and titanium carbonitride are formed, providing a high hardness of the coating. Plasma coatings deposited in a nitrogen atmosphere have a higher hardness (19.6 GPa) than coatings deposited in air (16.2 GPa), which is due to a higher content of nitride crystalline phases in the coating material. XRD data show that the coherent-scattering region of crystalline phases in coatings deposited in an atmosphere of air and in a nitrogen atmosphere is ~10–40 nm, which confirms the nanostructuring of all crystalline phases present in the coating.

中文翻译：

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在氮气氛中沉积超硬 Ti-C-N 等离子涂层

摘要

展示了在氮气氛中在金属基材上制造基于钛、氮和碳的超硬等离子涂层的可能性。在电腐蚀含钛等离子体的超高速射流的作用下，涂层在一个短期加速器操作循环中沉积在基材表面上。SEM和XRD表明，形成了氮化钛和碳氮化钛的纳米结构层，提供了高硬度的涂层。在氮气气氛中沉积的等离子涂层比在空气中沉积的涂层 (16.2 GPa) 具有更高的硬度 (19.6 GPa)，这是由于涂层材料中氮化物结晶相的含量更高。