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Influence of Graded AlGaN sub-channel over the DC and Breakdown characteristics of a T-gated AlGaN/GaN/AlInN MOS-HEMT
Micro and Nanostructures ( IF 3.1 ) Pub Date : 2021-06-07 , DOI: 10.1016/j.spmi.2021.106954
V. Sandeep , J. Charles Pravin

The impact of graded Al0.05Ga0.95N sub-channel over the DC characteristics of AlGaN/GaN/AlInN Metal Oxide Semiconductor-High Electron Mobility Transistor (MOS-HEMT) has been investigated here. By placing a field plate over the gate region and forming a T-gated structure, the breakdown characteristics are examined using Sentaurus Technology Computer-Aided Design (TCAD) simulation tool. An analytical study is carried out into the evaluation of various device parameters like drain current, transconductance and threshold voltage. RF parameters like cut-off frequency and gain has also been examined. Various physical models such as hydrodynamic, thermodynamic, piezoelectric polarization, impact ionization models are considered. HfO2 as an oxide layer directly influences the charge confinement near the Two-Dimensional Electron Gas (2DEG), thereby causing a positive shift in the threshold voltage of the device. T-gated formation of the gate helped in enhancing the breakdown voltage of the device to nearly 750 V. A maximum current drive of 1.79 A/mm mm was obtained for the proposed device, nearly 24% improvement from the conventional Composite-channel (CC) HEMT. The current outcomes and the produced frequency characteristics determines the linearity enhancement occurred in the device, caused due to the graded AlGaN sub-channel below the GaN channel layer. The trade-off between specific on-resistance and breakdown voltage is well preserved by employing a T-gated structure with low normal gate length. The outcomes prove the device to be a prime contender for high power switching as well as large signal applications.



中文翻译:

梯度AlGaN子沟道对T型门控AlGaN/GaN/AlInN MOS-HEMT的DC和击穿特性的影响

分级Al 0的影响05 Ga 0 . 95 N 子沟道在 AlGaN/GaN/AlInN 金属氧化物半导体 - 高电子迁移率晶体管 (MOS-HEMT) 的直流特性上进行了研究。通过在栅极区域上方放置场板并形成 T 型门控结构,使用 Sentaurus Technology 计算机辅助设计 (TCAD) 仿真工具检查击穿特性。对各种器件参数(如漏极电流、跨导和阈值电压)的评估进行了分析研究。还检查了截止频率和增益等 RF 参数。考虑了各种物理模型,例如流体动力学、热力学、压电极化、碰撞电离模型。氢氟酸2因为氧化层直接影响二维电子气 (2DEG) 附近的电荷限制,从而导致器件阈值电压的正偏移。栅极的 T 门控形成有助于将器件的击穿电压提高到接近 750 V。所提出的器件获得了 1.79 A/mm mm 的最大电流驱动,比传统的复合通道 (CC) 提高了近 24% ) HEMT。当前结果和产生的频率特性决定了器件中发生的线性增强,这是由于 GaN 沟道层下方的渐变 AlGaN 子沟道引起的。通过采用具有低正常栅极长度的 T 型栅极结构,可以很好地保持特定导通电阻和击穿电压之间的平衡。

更新日期:2021-06-10
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