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Experimental study on machining germanium wafer with ice particle, fixed abrasive tools
The International Journal of Advanced Manufacturing Technology ( IF 3.4 ) Pub Date : 2021-06-05 , DOI: 10.1007/s00170-021-07352-4
Ze Yu , Yuli Sun , Guiguan Zhang , Wenzhuang Lu , Dunwen Zuo

A novel ice particle-fixed abrasive tool (IPFAT) was designed and manufactured in this paper. The uniformity of abrasives distribution in the IPFAT was tested. Using three kinds of IPFAT, which contains α-Al2O3 particles whose mean particle sizes are 5 μm, 1.289 μm, and 0.328 μm respectively; single crystal germanium wafers were lapped and then polished. The results show that the distribution of abrasives in the IPFAT is uniform and the IPFAT has the ability of self-sharpening. With the increased lap and polishing time, the surface roughness of the single crystal germanium wafers decreases linearly and the materials remove rate (MRR) basically remains invariable. After polishing with a 0.328 μm α-Al2O3 IPFAT, the surface roughness of the single crystal germanium wafer is 85 nm within 500 μm × 500 μm and the surface is even without obvious undulation.



中文翻译:

冰粒固定磨具加工锗片的实验研究

本文设计并制造了一种新型冰粒固定磨具(IPFAT)。测试了 IPFAT 中磨料分布的均匀性。采用三种IPFAT,其中含有平均粒径分别为5 μm、1.289 μm和0.328 μm的α-Al 2 O 3颗粒;单晶锗晶片被研磨然后抛光。结果表明,磨料在IPFAT中分布均匀,IPFAT具有自锐能力。随着研磨次数和抛光时间的增加,单晶锗晶片的表面粗糙度线性下降,材料去除率(MRR)基本保持不变。用 0.328 μm α-Al 2 O 3抛光后 IPFAT,单晶锗片在500μm×500μm范围内表面粗糙度为85nm,表面均匀,无明显起伏。

更新日期:2021-06-07
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