To overcome the inherent limitation of existing nanopositioning stages running in hundreds of micrometres, a novel normal-stressed electromagnetic actuator is developed to construct a direct drive XY nanopositioning stage, which features a contactless dual-axial actuation with a relatively high force density, a loosely-constrained stroke, and a monolithic magnetic circuit. Assisted by the established model, the mechanical-electromagnetic parameters for the stage are determined with a further verification through both finite element analyses and experimental tests. By combining a PID-based and a parallel resonant controller, the control system for the stage is constructed, which is then demonstrated by ultra-precisely tracking a Lissajous trajectory.

为了克服现有纳米定位平台在数百微米范围内运行的固有限制，开发了一种新型法向应力电磁致动器来构建直接驱动 XY 纳米定位平台，其特点是非接触式双轴驱动，具有相对较高的力密度，松散的- 受限制的行程，以及单片磁路。在建立的模型的辅助下，通过有限元分析和实验测试进一步验证确定了舞台的机械电磁参数。通过将基于 PID 的控制器和并联谐振控制器相结合，构建了舞台控制系统，然后通过超精确跟踪 Lissajous 轨迹来演示该控制系统。