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Determination of the Oxygen Concentration in GDP Thin Films Using Rutherford Backscattering Spectroscopy
Fusion Science and Technology ( IF 0.9 ) Pub Date : 2021-06-03 , DOI: 10.1080/15361055.2021.1927624
Xiaojun Ma 1 , Qi Wang 1 , Zongwei Wang 1 , Xiangyu Wan 1
Affiliation  

Abstract

The oxygen concentration in the glow discharge polymer (GDP) capsule is one of the perturbations that most limit implosion quality. In order to investigate the feasibility of the Rutherford backscattering (RBS) technique for characterizing the oxygen concentration in a GDP capsule, the basic principle of RBS and the experimental conditions are introduced first. Then, the irradiation damage effect of incident ions on the GDP film is simulated numerically. The simulated results demonstrate that the GDP films will be damaged by the incident ions, and the vacancy damage dominates in irradiation modification. Finally, some GDP thin films are measured using RBS, and the oxygen concentration and its depth profile are obtained from the measured RBS spectrum. The simulated and experimental results prove that the oxygen concentration of GDP films can be measured precisely using RBS with an uncertainty of about 3.5%.



中文翻译:

使用卢瑟福背散射光谱法测定 GDP 薄膜中的氧浓度

摘要

辉光放电聚合物 (GDP) 胶囊中的氧浓度是最能限制内爆质量的扰动之一。为了研究卢瑟福背散射(RBS)技术表征GDP胶囊中氧浓度的可行性,首先介绍了RBS的基本原理和实验条件。然后,数值模拟了入射离子对GDP薄膜的辐照损伤效应。模拟结果表明,GDP薄膜会被入射离子损坏,空位损伤在辐照改性中占主导地位。最后,一些 GDP 薄膜使用 RBS 进行测量,并从测量的 RBS 光谱中获得氧浓度及其深度分布。

更新日期:2021-08-05
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