Micro-robotics is a burgeoning field, with potential applications in search and rescue, smart dust, advanced additive manufacturing and micro-surgery. A critical component enabling micro-robotic systems is efficient actuator materials. In this work we introduce thin films of NdNiO ₃ , a prototypical perovskite nickelate, as a potential material for MEMS actuation, providing up to 6.0% tensile volumetric strain via hydrogen-ion intercalation, resulting in an experimentally demonstrated output work density of 6.7 J/cm ³ and stress output in excess of 1.1 GPa via a unique hydrogen doping mechanism. Separately, a stiffened cantilever array is fabricated to measure experimental tip deflection, which matches expected deflections from a developed finite element analysis model. [2020-0330]

中文翻译：

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钙钛矿镍酸盐致动器

微型机器人是一个新兴领域，在搜救、智能除尘、先进增材制造和显微外科领域具有潜在应用。实现微型机器人系统的关键组件是高效的致动器材料。在这项工作中，我们引入了 NdNiO ₃薄膜 ，一种原型钙钛矿镍酸盐 ，作为 MEMS 驱动的潜在材料，通过氢离子嵌入提供高达 6.0% 的拉伸体积应变，导致实验证明的输出功密度为 6.7 J/通过独特的氢掺杂机制，cm ³和超过 1.1 GPa 的应力输出。另外，制造了一个加筋悬臂阵列来测量实验尖端偏转，这与开发的有限元分析模型的预期偏转相匹配。[2020-0330]