In this work, ZnO films are deposited by the ultrasonic spray pyrolysis technique on soda lime glass substrates by following a specific design of experiment. The ZnO films are spray deposited using different elaboration parameters. Optical, morphological, structural and electrical properties of the ZnO films are systematically investigated. Fourier-transform infrared and transmittance spectra are measured to examine their optical properties. They are correlated to their structural properties determined by X-ray diffraction and Raman spectroscopy. The surface morphology is analyzed using atomic force microscopy while the electrical conductivity is measured using the four probe technique. This comprehensive analysis shows that ZnO thin films elaborated using ultrasonic spray pyrolysis with fast growth rate have a high transparency in a wide thickness range, making them suitable for use in applications such as all-oxide solar cells.

在这项工作中，按照特定的实验设计，通过超声波喷雾热解技术在钠钙玻璃基板上沉积 ZnO 薄膜。使用不同的加工参数喷涂沉积 ZnO 薄膜。系统地研究了 ZnO 薄膜的光学、形态、结构和电学性能。测量傅里叶变换红外光谱和透射光谱以检查它们的光学特性。它们与通过 X 射线衍射和拉曼光谱确定的结构特性相关。使用原子力显微镜分析表面形态，而使用四探针技术测量电导率。