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Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications
Nanophotonics ( IF 7.5 ) Pub Date : 2021-05-01 , DOI: 10.1515/nanoph-2021-0029
Weixin Liu 1, 2 , Yiming Ma 1, 2 , Yuhua Chang 1, 2 , Bowei Dong 1, 2 , Jingxuan Wei 1, 2 , Zhihao Ren 1, 2 , Chengkuo Lee 1, 2
Affiliation  

Long-wave infrared (LWIR, 6–14 µm) processes enormous potential for chem/biosensing as it covers abundant molecular absorption fingerprints. Waveguides provide an attractive chip-scale miniaturization solution for optical sensors. However, the exploration of waveguide sensors in this wavelength range is limited. Here, an LWIR photonic platform for fast and sensitive on-chip gas sensing is developed using suspended silicon (Si) waveguide supported by subwavelength grating (SWG) metamaterial claddings. This platform provides a viable approach to fully exploit the transparency window of Si. The SWG structure provides a promising solution to engineer the mode profile for strong light–analyte interaction. Propagation loss and bending loss are studied in the broad wavelength range of 6.4–6.8 µm. Functional devices including grating couplers, Y-junctions, and directional couplers are also demonstrated with high performance. Sensing demonstration based on our platform is presented using toluene vapor detection as an example. The corresponding limit of detection reaches 75 ppm. The response and recovery time to 75 ppm toluene are about 0.8 and 3.4 s, respectively. This good performance makes our platform a promising candidate for on-site medical and environmental applications.

中文翻译:

用于长波红外传感应用的带有亚波长光栅超材料包层的悬浮硅波导平台

长波红外(LWIR,6-14 µm)具有巨大的化学/生物传感潜力,因为它涵盖了丰富的分子吸收指纹。波导为光学传感器提供了极具吸引力的芯片级小型化解决方案。然而,在这个波长范围内对波导传感器的探索是有限的。在这里,使用由亚波长光栅 (SWG) 超材料包层支持的悬浮硅 (Si) 波导开发了用于快速灵敏的片上气体传感的 LWIR 光子平台。该平台提供了一种可行的方法来充分利用 Si 的透明窗口。SWG 结构为设计强光与分析物相互作用的模式分布提供了一个有前景的解决方案。在 6.4–6.8 µm 的宽波长范围内研究了传播损耗和弯曲损耗。功能器件包括光栅耦合器、Y 型接头、和定向耦合器也具有高性能。以甲苯蒸气检测为例,展示了基于我们平台的传感演示。相应的检测限达到75 ppm。对 75 ppm 甲苯的响应时间和恢复时间分别约为 0.8 秒和 3.4 秒。这种良好的性能使我们的平台成为现场医疗和环境应用的有希望的候选者。
更新日期:2021-06-02
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