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Synthesis, Properties and Structure of Arc-PVD Molybdenum and Molybdenum Nitride Monolayer Coatings
Russian Physics Journal ( IF 0.6 ) Pub Date : 2021-06-01 , DOI: 10.1007/s11182-021-02330-5
O. V. Krysina , Yu. F. Ivanov , N. A. Prokopenko , V. V. Shugurov , E. A. Petrikova , O. S. Tolkachev

The paper deals with the synthesis of coating based on molybdenum and molybdenum nitrides using cathodic arc deposition without the plasma assistance. The properties, composition and structure of the obtained coating are studied in detail. It is found that the nitrogen partial pressure in the gas mixture affects the nitrogen concentration in the coatings and the properties of the latter. The structure and phase composition of the coatings synthesized at a low partial pressure, are investigated by using the X-ray diffraction analysis and scanning electron microscopy.



中文翻译:

Arc-PVD钼和氮化钼单层涂层的合成、性能和结构

该论文涉及在没有等离子体辅助的情况下使用阴极电弧沉积合成基于钼和钼氮化物的涂层。对所得涂层的性能、组成和结构进行了详细研究。发现气体混合物中的氮分压影响涂层中的氮浓度和后者的性质。通过使用 X 射线衍射分析和扫描电子显微镜研究了在低分压下合成的涂层的结构和相组成。

更新日期:2021-06-01
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