Desire to integrate electronic devices more closely into the everyday life of the consumer led to the emergence of flexible devices, which can conform to any shape surface. These flexible devices are lighter, thinner, and more resilient than their rigid counterparts. Since consumers these days are heavily concerned about the visual look of any product along with its technological features, the flexible devices also pave the way for innovation and creativity from the aesthetic point of view. As more and more electronics including wearable devices and displays are shifting towards the flexible regime, their basic components like sensors and integrated circuits are also required to be flexible and conformal. This paper reviews the development and evolution of several types of flexible MEMS sensors, accelerometers, and energy harvesters from the design, fabrication, and performance perspective.

中文翻译：

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自封装、灵活、可弯曲的 MEMS 传感器和能量收集器

将电子设备更紧密地集成到消费者的日常生活中的愿望导致了可适应任何形状表面的柔性设备的出现。这些柔性设备比刚性设备更轻、更薄、更有弹性。由于如今的消费者非常关心任何产品的视觉外观及其技术特征，因此从美学的角度来看，灵活的设备也为创新和创造力铺平了道路。随着包括可穿戴设备和显示器在内的越来越多的电子产品转向柔性体系，它们的传感器和集成电路等基本组件也需要具有柔性和保形性。本文回顾了几种柔性 MEMS 传感器、加速度计、