Quantum photonic circuits with integrated on-demand quantum emitters can act as building blocks for photonic gates and processors with enhanced quantum functionality. To scale up such quantum devices to larger and more powerful systems, eventually reaching the quantum advantage, the scalable integration of many emitters with identical emission wavelengths is of utmost importance. Here, we report on the deterministic integration of self-assembled quantum dots (QDs) in waveguide structures by means of in situ electron beam lithography (EBL). Applying external bias voltages to the p-i-n-doped and electrically contacted quantum circuits allows for spectral fine-tuning of the QDs via the quantum confined Stark effect. We achieve a tuning range of (0.40 ± 0.16) nm, which together with a spectral pre-selection accuracy of (0.2 ± 1.6) nm in the in situ EBL process is on average large enough to tune individual QDs into resonance. Thus, deterministic QD integration with spectral pre-selection in conjunction with Stark tuning of the QD emission wavelength is an attractive combination that has high potential to enable the scalable fabrication of integrated quantum photonic circuits in the future.

中文翻译：

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使用量子限制斯塔克效应对确定性制造的量子点波导系统进行光谱控制

具有集成按需量子发射器的量子光子电路可以作为具有增强量子功能的光子门和处理器的构建块。为了将这样的量子装置扩展到更大和更强大的系统，最终达到量子优势，具有相同发射波长的许多发射器的可扩展集成至关重要。在这里，我们报告了自组装量子点 (QD) 在波导结构中的确定性集成，通过原位电子束光刻（EBL）。将外部偏置电压施加到 pin 掺杂和电接触的量子电路，允许通过量子限制斯塔克效应对 QD 进行光谱微调。我们实现了 (0.40 ± 0.16) nm 的调谐范围，加上原位EBL 过程中 (0.2 ± 1.6) nm 的光谱预选精度，平均足够将单个 QD 调整为共振。因此，确定性 QD 集成与光谱预选结合 QD 发射波长的 Stark 调谐是一种有吸引力的组合，具有很高的潜力，可以在未来实现集成量子光子电路的可扩展制造。