A force controlled nanocutting system based on a flexible mechanism was developed. Instead of utilizing force sensors, the force sensing and control in the developed system is realized by sensing and controlling the deformation of the flexible mechanism. With force feedback control for controlling the cutting force in real time, this system could achieve adaptive cutting along non-planar surfaces without prior knowledge about the surface shape. The finite element method was used to model the flexible mechanism and a Pareto-based multi-objective optimization algorithm with the goals of high force resolution and stability was used to obtain the geometric parameters of the flexible mechanism. During the cutting processing, a capacitive displacement sensor was used to detect the deformation of the flexible mechanism to measure the force in real time, and a piezoelectric ceramic actuator was used to adjust the feed position of the tool to control the cutting force. Nanocutting experiments of microstructures were successfully carried out on inclined and curved surfaces of ductile as well as brittle materials without prior knowledge of their surface forms.

开发了基于柔性机构的力控制纳米切割系统。代替利用力传感器，通过感测和控制柔性机构的变形来实现所开发系统中的力感测和控制。通过用于实时控制切削力的力反馈控制，该系统无需事先了解表面形状即可实现沿非平面表面的自适应切削。采用有限元方法对柔性机构进行建模，并以高分辨力和稳定性为目标，基于帕累托的多目标优化算法获得了柔性机构的几何参数。在切割过程中，使用电容式位移传感器检测柔性机构的变形，以实时测量力，使用压电陶瓷致动器来调节工具的进给位置，以控制切削力。无需事先了解其表面形态，就可以在韧性和脆性材料的倾斜和弯曲表面上成功进行微观结构的纳米切割实验。