Purpose

Parametric actuation in a microcantilever beam is analyzed. Here, displacement is given to the clamped end, which is determined through feedback. The sensor output has been considered with nonlinear characteristics. One of the motives of the article is to analyze the parametric excitation in a closed-loop system, where the feedback is having a feature of cubic nonlinearity. Also, the influence of noise on the response has been studied, where the power spectral density gets squeezed to certain frequencies. Another motive is to utilize the feedback based parametric excitation for a sensing application. Here, a novel scheme of mass sensing is presented for improved sensitivity, where the sensor nonlinearity and closed-loop excitation provides the scope for 3–7 times higher sensitivity.

Method

Dynamics of the cantilever beam model is studied using the multiple scales technique. For numerical analysis, discrete element method has been used. Parametric excitation based noise reduction has been demonstrated through numerical simulations, where the effect of thermal forces is considered through lumped forces.

Results

Comparing the outcome of perturbation analysis with the results of numerical simulations shows an excellent agreement. Analyzing the power spectrum of the sensor output, a novel method of mass detection has been proposed. It can provide superior performance in comparison to conventional resonant mass sensing.

中文翻译：

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具有传感器非线性和质量传感的基于反馈的参数驱动

目的

分析了微悬臂梁中的参数致动。在此，通过反馈确定夹紧端的位移。传感器输出被认为具有非线性特性。本文的动机之一是分析闭环系统中的参数激励，其中反馈具有三次非线性特征。此外，还研究了噪声对响应的影响，其中功率谱密度被压缩到某些频率。另一个动机是将基于反馈的参数激励用于感测应用。在这里，提出了一种新的质量传感方案，以提高灵敏度，其中传感器的非线性和闭环激励为灵敏度提供了3至7倍的范围。

方法

使用多尺度技术研究了悬臂梁模型的动力学。对于数值分析，已使用离散元法。通过数值模拟已经证明了基于参数激励的降噪，其中通过集中力来考虑热力的影响。

结果

将摄动分析的结果与数值模拟的结果进行比较显示出极好的一致性。分析传感器输出的功率谱，提出了一种新的质量检测方法。与传统的共振质量感测相比，​​它可以提供卓越的性能。