Abstract

Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

摘要

由于其独特的色散特性，光栅在各种光学系统中起着至关重要的作用。近年来，对于用于广泛的现场应用的光学系统的小型化的需求不断增长。因此，衍射光栅与MEMS技术的集成提供了构建真正小型化光学系统的有效方法。到目前为止，MEMS衍射光栅主要在两个方向上进行研究，即MEMS扫描光栅和MEMS可调光栅。MEMS扫描光栅由各种MEMS致动器构成，以驱动光栅平台扫描整个目标，并且它们在各种扫描系统中都发挥着重要作用。同时，光栅扫描仪的色散特性使它们在包括光谱仪和高光谱成像系统在内的波长传感应用中具有吸引力。可调谐光栅通常采用MEMS致动器来动态改变衍射特性，从而针对特定应用调整其波长灵敏度。因此，本文将详细介绍这两种类型的MEMS光栅，并评估它们在各个领域的效率和优势。