ZnO nanoparticles/quartz surface acoustic wave (SAW) humidity sensors were fabricated, and their sensing performance was investigated. The pristine ZnO deposited on ST-cut quartz substrates by radio frequency magnetron sputtering is nanoparticles with grain sizes of 20–50 nm. The comparative analysis for humidity sensing applications of SAW-Love devices based on ZnO sensitive layers with different deposition pressures (0.25 Pa, 0.5 Pa, 1.0 Pa) was conducted, and their properties such as sensor sensitivity, response and recovery were studied. The sensors exhibit a good sensitivity in relative humidity (RH) from ~ 1% RH to 95% RH. Rayleigh mode and Sezawa mode frequency responses of the sensors increase with increasing humidity. The Sezawa mode shows 2–3 times higher humidity sensitivity than its Rayleigh mode counterpart for different RH. Rayleigh and Sezawa mode of 0.5 Pa ZnO nanoparticles-based SAW-Love sensor obtains a higher average sensitivity of 237.4 Hz/% RH and 388.1 Hz/% RH, respectively. Furthermore, the measured response frequencies values decrease rapidly and returned to near the initial state after moisture off. This comparative study demonstrates that the SAW-Love based on Sezawa mode has a great potential for applications in chemo-sensors.

制备了ZnO纳米颗粒/石英表面声波（SAW）湿度传感器，并对其传感性能进行了研究。通过射频磁控溅射沉积在ST切割石英基板上的原始ZnO是粒径为20–50 nm的纳米粒子。对具有不同沉积压力（0.25 Pa，0.5 Pa，1.0 Pa）的ZnO敏感层的SAW-Love器件的湿度传感应用进行了比较分析，并研究了其灵敏度，响应和恢复等特性。传感器在〜1％RH至95％RH的相对湿度（RH）中显示出良好的灵敏度。传感器的瑞利模式和塞泽瓦模式的频率响应随湿度的增加而增加。对于不同的RH，Sezawa模式显示的湿度灵敏度比Rayleigh模式对应的湿度灵敏度高2-3倍。基于0.5 Pa ZnO纳米粒子的SAW-Love传感器的瑞利和Sezawa模式分别获得了237.4 Hz /％RH和388.1 Hz /％RH的更高平均灵敏度。此外，测得的响应频率值迅速降低，并在除湿后返回到初始状态附近。这项比较研究表明，基于Sezawa模式的SAW-Love在化学传感器中具有巨大的应用潜力。