Glow and filamentary regimes of atmospheric pressure plasma-enhanced chemical vapor deposition in a planar dielectric barrier discharge configuration were compared for thin-film deposition from ethyl lactate (EL). EL decomposition in the plasma phase and thin-film composition were both characterized by Fourier-transform infrared spectroscopy. EL chemical bonds' concentration along the gas flow decreases progressively in the glow dielectric barrier discharge (GDBD), whereas it drastically oscillates in the filamentary dielectric barrier discharge (FDBD), with values higher than that of the initial mixture. EL decomposition route depends on the discharge regime, as the decrease of the concentration of the different investigated bonds is different for an identical amount of energy provided to EL molecules. CO₂ is systematically formed reaching concentrations of 25 and 40 ppm, respectively, in FDBD and GDBD.

中文翻译：

---

丝状和辉光介质阻挡放电中乳酸乙酯分解和薄膜涂层的傅里叶变换红外光谱

比较了平面介质阻挡放电配置中大气压等离子体增强化学气相沉积的辉光和细丝状态，用于乳酸乙酯 (EL) 的薄膜沉积。等离子体相中的 EL 分解和薄膜成分均通过傅里叶变换红外光谱进行表征。EL 化学键在气流中的浓度在辉光介质阻挡放电 (GDBD) 中逐渐降低，而在丝状介质阻挡放电 (FDBD) 中则剧烈振荡，其值高于初始混合物的值。EL 分解路线取决于放电方式，因为对于提供给 EL 分子的相同量的能量，不同研究键的浓度降低是不同的。CO ₂ 在 FDBD 和 GDBD 中系统地形成浓度分别达到 25 和 40 ppm。