To improve the reliability and yield of thermopile infrared detectors, a self-test, self-calibration and self-repair methodology is proposed in this paper. A novel micro-electro-mechanical system (MEMS) infrared thermopile detector structure is designed in this method with a heating resistor building on the center of the membrane. The heating resistor is used as the stimuli of the sensing element on chip to achieve a self-test, and the responsivity related with ambient temperature can be calibrated by the equivalent model between electrical stimuli and physical stimuli. Furthermore, a fault tolerance mechanism is also proposed to localize the fault and repair the detector if the detector fails the test. The simulation results with faults simulated by the Monte Carlo stochastic model show that the proposed scheme is an effective solution to improve the yield of the MEMS thermopile infrared detector.

中文翻译：

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热电堆红外探测器的自测，自校准和自修复方法

为了提高热电堆红外探测器的可靠性和良率，提出了一种自测试，自校准和自修复的方法。用这种方法设计了一种新颖的微机电系统（MEMS）红外热电堆检测器结构，并在膜的中心构建了一个加热电阻器。加热电阻器用作芯片上感应元件的刺激以实现自检，并且可以通过电刺激和物理刺激之间的等效模型来校准与环境温度相关的响应度。此外，还提出了一种容错机制来定位故障并在检测器未通过测试时修复检测器。