The development of new nanomaterials with controlled characteristics for nanophotonics is of great relevance. In this work, photonic crystals with reflectance at the wavelength of 690nm and the value of 28% were formed by porous-alumina-assisted-anodizing of system Al/Ta on Si wafer. By selecting improved anodizing modes of system Al/Nb on glass, the reflectance was increased to 42% at the wavelength of 340nm. This result shows the high promise of the proposed methods and in the future will significantly improve the result by trying two- or three-stage methods of porous-alumina-assisted-anodizing, nanoimprint stamps and optimization of the anodizing modes for any wavelengths.

中文翻译：

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通过 Al/Nb 和 Al/Ta 系统的多孔氧化铝辅助阳极氧化产生的反射光子晶体

对纳米光子学具有可控特性的新型纳米材料的开发具有重要意义。在这项工作中，在 690 波长处具有反射率的光子晶体nm 和 28% 的值是通过在 Si 晶片上的 Al/Ta 体系的多孔氧化铝辅助阳极氧化形成的。通过在玻璃上选择改进的 Al/Nb 体系阳极氧化模式，在 340 波长处的反射率提高到 42%纳米。该结果表明所提出的方法具有很高的前景，并且在未来将通过尝试多孔氧化铝辅助阳极氧化、纳米压印印模和任何波长的阳极氧化模式优化的两阶段或三阶段方法来显着改善结果。