With the rapid development of micro electro mechanical systems (MEMS), the high-precision measurement technology applied to MEMS devices becomes increasingly important. Traditional micro scale measurement techniques such as scanning electron microscope (SEM), atomic force microscope (AFM), and scanning tunnelling microscope (STM) are widely used in measuring the surface topography and local deformation of MEMS. However, these scanning-based measurement technologies are difficult to achieve full-field and dynamic detection, and they are easy to cause damages to the measured object. In this paper, the microscopic speckle interferometry and heterodyne technology are combined to realize the measurement of constant velocity of MEMS. We presented the experimental principle of temporal heterodyne microscopic speckle interferometry, and measured the real-time motion of MEMS, which verified the feasibility of this method. The experimental results prove that our method has the advantages of real-time, full-field, good noise immunity and low-cost.

随着微机电系统（MEMS）的飞速发展，应用于MEMS器件的高精度测量技术变得越来越重要。传统的微尺度测量技术，例如扫描电子显微镜（SEM），原子力显微镜（AFM）和扫描隧道显微镜（STM）被广泛用于测量MEMS的表面形貌和局部变形。但是，这些基于扫描的测量技术难以实现全场和动态检测，并且容易对被测物体造成损坏。本文将显微散斑干涉技术与外差技术相结合，实现了对MEMS恒速的测量。我们提出了时间外差显微散斑干涉法的实验原理，并测量了MEMS的实时运动，验证了该方法的可行性。实验结果证明，该方法具有实时，全场，抗噪声能力强，成本低的优点。