The simple dependence of the intensity in annular dark field scanning transmission electron microscopy images on the atomic number provides (to some extent) chemical information about the sample, and even allows an elemental identification in the case of light-element single-layer samples. However, the intensity of individual atoms and atomic columns is affected by residual aberrations and the confidence of an identification is limited by the available signal to noise. Here, we show that matching a simulation to an experimental image by iterative optimization provides a reliable analysis of atomic intensities even in presence of residual non-round aberrations. We compare our new method with other established approaches demonstrating its high reliability for images recorded at limited dose and with different aberrations. This is of particular relevance for analyzing moderately beam-sensitive materials, such as most 2D materials, where the limited sample stability often makes it difficult to obtain spectroscopic information at atomic resolution.

环形暗场扫描透射电子显微镜图像中强度对原子序数的简单依赖（在某种程度上）提供了有关样品的化学信息，甚至在光元素单层样品的情况下甚至可以进行元素鉴定。但是，单个原子和原子列的强度会受到残留像差的影响，并且识别的可信度受到可用信号对噪声的限制。在这里，我们表明通过迭代优化将模拟与实验图像匹配，即使在存在残留非圆像差的情况下，也可以对原子强度进行可靠的分析。我们将我们的新方法与其他已建立的方法进行了比较，证明了其在有限剂量和不同像差下记录的图像具有很高的可靠性。