In this work, In ₂ O ₃ electrolyte gated thin film transistors (In ₂ O ₃ -EGTFTs) with integrated on-chip gate electrode were investigated as a label-free biosensor. The In ₂ O ₃ channel works as sensitive membrane and the on-chip gate electrode replaces reference electrode. The pH sensitivity of the device is 64 mV/pH with the deviation of 10 mV. The In ₂ O ₃ channel was coated by streptavidin/neutravidin receptors to detect the target biomolecules of biotin. The streptavidin modified device presents an ultra-low working voltage ( $\text{V}_{\text{G}}=0$ V, $\text{V}_{\text{DS}}=50$ mV) and the detection limit as low as 50 pg $\cdot $ mL $^{-1}$ . And the neutravidin modified device presents apparent detecting performance even in low biotin concentration of 50 fg $\cdot $ mL $^{-1}$ under a working voltage of $\text{V}_{\text{G}}=2$ V and $\text{V}_{\text{DS}}=50$ mV. This work provides a high-performance biosensor device with low power consumption and simple structure that is easy to integrate and package.

中文翻译：

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基于 In₂O₂ 电解质栅极薄膜晶体管的生物传感器，具有集成的片上栅极电极

在这项工作中，研究了 具有集成片上栅电极的In ₂ O ₃电解质门控薄膜晶体管（In ₂ O ₃ -EGTFT）作为无标记生物传感器。In ₂ O ₃通道用作敏感膜，片上栅电极代替参比电极。该装置的 pH 灵敏度为 64 mV/pH，偏差为 10 mV。In ₂ O ₃通道被链霉亲和素/中性亲和素受体包被以检测生物素的目标生物分子。链霉亲和素修饰装置呈现超低工作电压（ $\text{V}_{\text{G}}=0$ Ⅴ、 $\text{V}_{\text{DS}}=50$ mV)，检测限低至 50 pg $\cdot $ 毫升 $^{-1}$ . 并且即使在50 fg的低生物素浓度下，neutravidin修饰的装置也表现出明显的检测性能 $\cdot $ 毫升 $^{-1}$ 在工作电压为 $\text{V}_{\text{G}}=2$ V 和 $\text{V}_{\text{DS}}=50$ 毫伏。这项工作提供了一种低功耗、结构简单、易于集成和封装的高性能生物传感器装置。