In this work, In2O3 electrolyte gated thin film transistors (In2O3-EGTFTs) with integrated on-chip gate electrode were investigated as a label-free biosensor. The In2O3 channel works as sensitive membrane and the on-chip gate electrode replaces reference electrode. The pH sensitivity of the device is 64 mV/pH with the deviation of 10 mV. The In2O3 channel was coated by streptavidin/neutravidin receptors to detect the target biomolecules of biotin. The streptavidin modified device presents an ultra-low working voltage (VG=0 V, VDS=50 mV) and the detection limit as low as 50 pg·mL-1. And the neutravidin modified device presents apparent detecting performance even in low biotin concentration of 50 fg·mL-1 under a working voltage of VG=2 V and VDS=50 mV. This work provides a high-performance biosensor device with low power consumption and simple structure that is easy to integrate and package.

中文翻译：

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基于具有集成片内栅极的In2O3电解质门控薄膜晶体管的生物传感器。

在这项工作中，研究了集成有片上栅电极的In2O3电解质门控薄膜晶体管（In2O3-EGTFT）作为无标记生物传感器。In2O3通道用作敏感膜，片上栅电极代替参比电极。设备的pH灵敏度为64 mV / pH，偏差为10 mV。In2O3通道被链霉亲和素/中性亲和素受体包被，以检测生物素的目标生物分子。链霉亲和素修饰的器件具有超低的工作电压（VG = 0 V，VDS = 50 mV），检出限低至50 pg·mL-1。而且中性亲和素修饰的装置即使在VG = 2 V和VDS = 50 mV的工作电压下甚至在50 fg·mL-1的低生物素浓度下也表现出明显的检测性能。