Abstract

This article proposed a new solution to do the plasma cleaning under low pressure based on a domestic microwave oven. A conical bottle was placed in the oven according to the electric field distribution calculated by finite element method and Helmholtz equation. A vacuum pump was employed to make a low pressure environment in the bottle to generate plasma. Experiments demonstrated that discharges in the domestic microwave oven under low pressures from 100 Pa to 300 Pa can be easily triggered and maintained when the working gases were argon and air. The lower the pressure was, the easier to trigger and generate plasma, and the more uniform the plasma inside the conical bottle was. Experiments also found that this low-pressure Ar plasma generated in the domestic microwave oven can efficiently clean up the oils on the metallic sheets or glass substrates without damaging them.

摘要

本文提出了一种基于家用微波炉进行低压等离子清洗的新方案。根据有限元法和亥姆霍兹方程计算的电场分布，将锥形瓶放入烘箱中。使用真空泵在瓶中形成低压环境以产生等离子体。实验证明，当工作气体为氩气和空气时，家用微波炉在100-300Pa的低压下放电很容易触发和维持。压力越低，越容易触发和产生等离子体，锥形瓶内的等离子体越均匀。