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High-precision laser power scale transfer based on shape detection
Optical Engineering ( IF 1.3 ) Pub Date : 2021-05-01 , DOI: 10.1117/1.oe.60.5.054103
Chaochen Li 1 , Yuqiang Deng 1
Affiliation  

A laser power scale transfer technique was developed based on shape detection; using this technique, detectors can be precisely centered on laser beams, thereby significantly reducing measurement errors introduced by detector nonuniformities and misalignments. A modified imaging scheme was designed and embedded in the scale transfer setup, and the effective resolution was proven to be better than 100 μm, compatible for incident lasers with diameters under 15 mm. For different types of detectors, absolute positioning was realized using objective algorithms with repeatability errors of 7 to 13 μm, which is an improvement of over 30 times the limitation of human-vision-based positioning. Correspondingly, the relative measurement error caused by detector non-uniformity for a typical calibration was reduced by a factor of 19–40 in the scale transfer process. The proposed technique thus has the potential for detector-based optical metrological applications that are influenced by geometric accuracy.

中文翻译:

基于形状检测的高精度激光功率刻度传输

基于形状检测的激光功率刻度传递技术得到发展。使用这种技术,检测器可以精确地对准激光束的中心,从而显着减少了由于检测器不均匀和未对准而引起的测量误差。设计了一种改进的成像方案并将其嵌入到鳞片转移装置中,并证明有效分辨率优于100μm,与直径小于15 mm的入射激光兼容。对于不同类型的探测器,使用具有7至13μm重复性误差的客观算法实现了绝对定位,这是基于人类视觉的定位限制的30倍以上的改进。相应地,在典型的校准过程中,由检测器不均匀引起的相对测量误差减少了19-40倍。因此,所提出的技术具有受几何精度影响的基于探测器的光学计量应用的潜力。
更新日期:2021-05-06
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