A monolithic manufacturing process is presented for the realization of active-matrix meshed thin-film-transistor (TFT) arrays on foil with physical voids between pixels, realizing membrane-like electronic arrays. The process is scalable to large-area substrates and enables (improved performance of) biometrics-under-display applications. Moreover, membrane-like TFT arrays provide opportunities for the use of TFT technology, and broader large-area thin-film electronics, in new applications in the domain of biomedical electronics, as demonstrated by example use cases of in vivo electrophysiology of the brain as well as in vitro electrophysiology in smart microwell plates.

中文翻译：

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有源矩阵网状电子薄膜晶体管阵列，用于生物特征显示和生物医学应用

提出了一种单片制造工艺，用于在箔片上实现有源矩阵网状薄膜晶体管（TFT）阵列并在像素之间形成物理空隙，从而实现膜状电子阵列。该过程可扩展到大面积基板，并支持显示不足的生物识别应用（提高其性能）。此外，膜状TFT阵列为生物医学电子领域中的新应用提供了使用TFT技术和更广泛的大面积薄膜电子设备的机会，如脑部体内电生理学的使用案例所示：以及智能微孔板中的体外电生理学。