Ferroelectric phase transformation was compared between the Hf_0.5Zr_0.5O₂ solid solution films and the HfO₂/ZrO₂ nanolaminate films, prepared by sputter deposition without heat treatment and crystallized by following cap annealing. Physical analyses showed that nanolaminate structures and their interfaces were robust even after high-temperature annealing. Ferroelectricity appeared largely in the nanolaminate films than in the solid solution film, and the best performance was attained in the nanolaminate film with the cycle thickness of monolayer oxide (0.25nm). Long period annealing cleared that the ferroelectric phase transformation is greatly accelerated in the nanolaminate films than in the solid solution films.

_{Hf 0.5} Zr _0.5 O ₂固溶体膜与HfO ₂ /ZrO ₂的铁电相变比较纳米层压薄膜，通过溅射沉积制备，无需热处理，并通过随后的帽退火结晶。物理分析表明，纳米层压结构及其界面即使在高温退火后也很坚固。与固溶体薄膜相比，纳米叠层薄膜中铁电性的表现要大得多，并且在单层氧化物循环厚度（0.25nm）的纳米叠层薄膜中获得了最好的性能。长时间退火表明，纳米层压薄膜中的铁电相变比固溶体薄膜中的铁电相变大得多。